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个人信息Personal Information
教授
博士生导师
硕士生导师
主要任职：Head, Photonics Research Center,
其他任职：辽宁省先进光电子技术重点实验室 主任
性别：男
毕业院校：比利时根特大学
学位：博士
所在单位：光电工程与仪器科学学院
学科：光学工程. 测试计量技术及仪器. 通信与信息系统
办公地点：光仪学院厚望楼405
联系方式：Tel：0411 84706491
电子邮箱：mszhao@dlut.edu.cn
Design and fabrication of polymer-based multimode interference optical splitters
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论文类型：期刊论文
发表时间：2016-11-01
发表刊物：OPTICAL ENGINEERING
收录刊物：SCIE
卷号：55
期号：11
ISSN号：0091-3286
关键字：multimode interference; optical splitter; polymer; nanoimprint lithography
摘要：A polymer-based multimode interference optical splitter chip has been designed and fabricated. Fiber-waveguide coupling loss as well as the structure of the multimode waveguide are optimized in the design to achieve higher performance. A simple UV-based soft nanoimprint lithography (Soft UV-NIL) technique is adopted in the fabrication. Fluorinated acrylate resins, LFR, with different refractive indices are used in this work. Both the residual layer and waveguide deformation are improved by controlling the fabrication processes. An average of 12.98 dB insertion loss is obtained from 1 x 4 splitters with 1.08 dB uniformity and 0.05 dB polarization-dependent loss. The validity of the polymer optical splitters fabricated through Soft UV-NIL technique is demonstrated by software simulation as well as experimental works. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)