Release Time:2023-03-30 Hits:
Date of Publication: 2022-10-09
Journal: Plasma Science and Technology
Volume: 13
Issue: 5
Page Number: 600-603
ISSN: 1009-0630
Prev One:Structural and mechanical properties of AIN films by pulsed sias arc ion plating
Next One:Structures and properties of the Al-doped ZnO thin films prepared by radio frequency magnetron sputtering