Release Time:2023-03-30 Hits:
Date of Publication: 2022-10-06
Journal: 半导体光电
Volume: 27
Issue: 4
Page Number: 412-415
ISSN: 1001-5868
Note: 新增回溯数据
Prev One:用等离子体增强化学气相沉积制备微晶硅薄膜
Next One:硅薄膜锂离子电池负极材料制备工艺及性能研究