用ECR-PECVD低温沉积多晶硅薄膜

Release Time:2023-03-30  Hits:

Date of Publication: 2022-10-06

Journal: 半导体光电

Volume: 27

Issue: 4

Page Number: 412-415

ISSN: 1001-5868

Note: 新增回溯数据

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