location: Current position: Aimin Wu >> Scientific Research >> Paper Publications

玻璃衬底上低温沉积GaN薄膜研究

Hits:

Date of Publication:2022-10-06

Journal:半导体技术

Issue:10

Page Number:880-884

ISSN No.:1003-353X

Note:新增回溯数据

Pre One:燃料电池钛基金属双极板的表面改性

Next One:玻璃衬底沉积氮化硅薄膜性能研究