Ar流量对ECR-PECVD制备氢化纳米晶硅薄膜结构及性能影响研究

Release Time:2023-04-10  Hits:

Date of Publication: 2022-10-05

Journal: 人工晶体学报

Issue: 9

Page Number: 1750-1756

ISSN: 1000-985X

Prev One:A Novel Method of Synthesizing Boron-doped Carbon Catalysts

Next One:Band-gap tailoring and visible-light-driven photocatalytic performance of porous (GaN)(1-x)(ZnO)(x) solid solution