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α-Al2O3上生长GaN过程中氮化的研究

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Date of Publication:2022-10-04

Journal:红外与激光工程

Issue:5

Page Number:721-724

ISSN No.:1007-2276

Pre One:TMGa流量对玻璃衬底上低温沉积GaN的影响

Next One:ZnO:Al衬底上低温生长GaN薄膜
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