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常温常压下等离子体化学气相沉积制备纳米晶TiO2薄膜的方法

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First Author:Zhu Aimin

Disigner of the Invention:dingtianying,Shi Chuan,xuyong

Application Number:CN200710010707.0

Authorization Date:2007-03-21

Authorization number:CN101045611

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