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论文类型：期刊论文

发表时间：2009-11-10

发表刊物：MODERN PHYSICS LETTERS B

收录刊物：SCIE、Scopus

卷号：23

期号：28

页面范围：3409-3417

ISSN号：0217-9849

关键字：Dual frequency; capacitively coupled plasmas; non-uniformity

摘要：Radial non-uniformities of dual frequency capacitively coupled argon plasma were experimentally studied, using an optical emission spectroscopy probe, for different discharge pressures, discharge gaps, and frequencies and powers of the low frequency source. It was shown that the plasma emission profiles strongly depend on the working gas pressure and the lower frequency (LF) power. With the increasing LF power the emission profiles changed from a bell-shaped distribution at low LF power to a double-peak distribution at high LF power.