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论文类型：期刊论文

发表时间：2019-10-01

发表刊物：OPTICS AND LASERS IN ENGINEERING

收录刊物：SCIE、EI

卷号：121

页面范围：74-79

ISSN号：0143-8166

关键字：Laser interferometer; Two-beam interference; Spatial phase modulation; Wavelength meter; Thickness measurement

摘要：We propose and realize a spatial phase modulation laser interferometer (SPMLI), which mainly consists of a laser source, an optical fiber, a transparent plate and a linear charge coupled device (CCD). The reflected beams from the upper and lower surfaces of the transparent plate produce two-beam interference. The generated spatial phase modulation interference image is taken by the CCD. The spatial frequency of the image is proportional to the wave number of the laser light and the thickness of the transparent plate. Experimental results show that the wavelength and thickness can be measured in picometer-level and nanometer-level resolution, respectively. Compared with other interferometers, the proposed interferometer has the advantages of simple structure, low cost and no need for mechanical scanning components.