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高功率调制脉冲磁控溅射沉积TiAlSiN纳米复合涂层对钛合金基体抗氧化性能的影响研究

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Indexed by:期刊论文

Date of Publication:2021-03-06

Journal:表面技术

Volume:49

Page Number:220-227

Pre One:A global plasma model for reactive deposition of compound films by modulated pulsed power magnetron sputtering discharges

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