超高纯含氟气体生产工艺设计与净化核心吸附剂开发
Release Time:2022-05-24
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Leading Scientist:陈绍云
Project Participants:张永春,刘家旭
Project Source:企、事业单位委托
Status:在研
Supported by:Cangzhou Huayu Special Gas Technology Co., Ltd.
Nature of Project:横向
Date of Project Approval:2022-04-13
Scheduled Completion Time:2022-04-13
Date of Project Initiation:2022-04-13
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