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电弧离子镀/磁控溅射复合真空退火制备Ti2AlC涂层

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Indexed by:Journal Papers

Date of Publication:2019-01-01

Journal:电镀与涂饰

Included Journals:PKU

Volume:38

Issue:21

Page Number:1160-1165

ISSN No.:1004-227X

Key Words:碳化铝钛;金属陶瓷;电弧离子镀;磁控溅射;真空退火;温度;微观结构

Abstract:采用自主研发的大弧源技术,复合中频磁控溅射石墨靶,避免 H 元素的引入,在锆合金表面快速沉积了致密、超厚(约20 μm)的Ti-Al-C涂层.经过不同温度(550、650、750和850 ℃)和时间(1、2和3 h)的真空退火后发现,至少在650 ℃才能获得Ti2AlC结构,更高的温度会加速Ti2AlC的生成.高温沉积对制备Ti2AlC相涂层而言是必备的.

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