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Indexed by:期刊论文

Date of Publication:2014-06-01

Journal:CHINESE PHYSICS B

Included Journals:SCIE、EI、ISTIC

Volume:23

Issue:6

ISSN No.:1674-1056

Key Words:cubic BN films; B-C-N interlayer; stress; hardness

Abstract:Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.