Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2014-06-01

Journal: CHINESE PHYSICS B

Included Journals: ISTIC、EI、SCIE

Volume: 23

Issue: 6

ISSN: 1674-1056

Key Words: cubic BN films; B-C-N interlayer; stress; hardness

Abstract: Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.