Current position: Home >> Scientific Research >> Patents

基片梯度加热器

Hits:

First Author:Wenqi Lu

Disigner of the Invention:XU Jun,dongchuang

Application Number:CN200810011450.5

Authorization Date:2008-05-15

Authorization number:CN101307434

Pre One:一种基于虚拟仪器的朗缪尔探针等离子体诊断方法

Next One:射频等离子体探针装置