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论文类型：期刊论文

发表时间：2009-05-01

发表刊物：1st International Symposium on Hybrid Materials and Processing (HyMaP 2008)

收录刊物：SCIE、EI、CPCI-S

卷号：9

期号：,SI

页面范围：S174-S178

ISSN号：1567-1739

关键字：Titanium oxynitride coating; Arc ion plating; Pulsed bias; Optical property; Mechanical property

摘要：Composite TiOxNy films were synthesized with pulsed bias arc ion plating from two Ti target evaporators in a gaseous mixture of At, N-2 and O-2. With the substrate bias varying from 0 to -700 V, the structural, compositional, mechanical and optical properties of the films were characterized with X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS), wear tests and UV-VIS absorption spectra. XRD and XPS results show that deposited at a substrate bias of -100 V, the film crystallized in a mixture of Anatase and Rutile TiO2 phases with 0 locations partly substituted by N atoms. The threshold wavelength of optical absorption shifts from 367 to 400 nm after N doped, which is related with band gap narrowing cased by N doping. The wear tests indicate that friction efficient first decreases, then increases as the substrate bias goes up. The films deposited at a bias of -300 V exhibit the lowest friction efficient, less than 0.15. For the films on steel substrates, the TiOxNy films deposited at -300 and -500 V exhibit the highest adhesion strength and nano-hardness, respectively. (C) 2009 Elsevier B.V. All rights reserved.