个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:法国洛林国立综合理工学院
学位:博士
所在单位:材料科学与工程学院
电子邮箱:dong@dlut.edu.cn
-Fe3Si8M ternary alloy thin films prepared by magnetron sputtering
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论文类型:期刊论文
发表时间:2012-01-01
发表刊物:Wuli Xuebao/Acta Physica Sinica
收录刊物:PKU、ISTIC、Scopus
卷号:61
期号:24
ISSN号:10003290
摘要:-FeSi2 is a promising environment-friendly semiconductor material. However it is difficult to obtain pure phase for such a line compound. To investigate the solubilities for a third alloying elements, in this work Fe3Si8M (M = B, Cr, Ni, Co) ternary alloys are designed based on the cluster-plus-glue-atom-model. Thin films are then prepared using magnetron sputtering. The as-deposited films are all amorphous and become crystallized after annealing at 850 for 4 h. It is shown that samples alloyed with third components Cr and B can reach single phase easily. However, the main phase is phase and the films tend to exhibit metallic characteristics while alloyed with Co. Of these films, the Fe2.7Si8.4B0.9 film presents the most prominent semiconductor performance, and it has a resistivity of 0.17 cm, a sheet carrier concentration of 2.8 1020 cm-3, a mobility of 0.13 cm2/V s and a band-gap width of 0.65 eV. It is confirmed that doping a proper third component can expand the phase zone, exhibiting a similar semiconductor property to that of binary -FeSi2. ? 2012 Chinese Physical Society.