点击次数：

论文类型：期刊论文

发表时间：2014-06-01

发表刊物：CHINESE PHYSICS B

收录刊物：SCIE、EI、ISTIC

卷号：23

期号：6

ISSN号：1674-1056

关键字：cubic BN films; B-C-N interlayer; stress; hardness

摘要：Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.