Abstract: Silicon thin film anode materials with different crystallinity and thickness were prepared by microwave plasma enhanced chemical vapor deposition technology and magnetron sputtering technology, and the effects of crystallinity and film thickness on the cycle performance of silicon thin film anode materials were studied through a series of tests. The results show that with the decrease of crystallization rate, the cyclic stability of silicon films is improved, and pure amorphous silicon films have more excellent cyclic stability. In the process of lithium intercalation, the cyclic stress of the thin silicon film is small, and the film is only split into island structures with the size of tens of microns under the action of stress, so that the adhesion between the film and the copper matrix is maintained well and effective electrical contact is maintained. At the same time, the separated island structure is also beneficial to further release the volume expansion of the silicon anode during the cycle, so that the overall structure remains intact and stable, and the film presents better cycle performance.