Abstract: Metallic glasses are widely used due to its good soft magnetic properties, good plasticity, wear resistance, corrosion resistance, surface smooth and other characteristics. Bulk metallic glass has the disadvantages of macro brittleness and poor processing performance at room temperature, which limits its application, while thin-film metallic glass is easy to be manufactured and can overcome the brittleness defects of bulk glass, thus becoming a research hotspot. The research achievements of thin-film metallic glass in recent ten years were summarized, the preparation methods were introduced, including physical vapor deposition and electroplating which have been used in industry, among which magnetron sputtering and arc ion plating are widely used. The properties of non-adhesion, fatigue resistance, corrosion resistance, biocompatibility, wear resistance, optical performance, catalytic performance and related influencing factors were elaborated. It is found that Z-MGTF can show many kinds of performance at the same time, and the comprehensive performance is the best, the film non-adhesion deserves special attention. The application of metallic glass film in improving alloy properties, biomedical and semiconductor fields is described, coating on biomedical materials can improve the non-viscosity and antibacterial properties of biomedical materials and accelerate wound healing, which has great potential. Finally, the future research trends in this field were prospected by summarizing the challenges and problems to be solved in the application of metallic glass thin film.

DOI: 10.16490/j.cnki.issn.1001-3660.2020.05.002