Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection

Date：2024-03-05  Hits:

Journal:2017 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY ADVANCED OPTICAL SENSORS AND APPLICATIONS

Affiliation of Author(s):光电工程与仪器科学学院

Volume:10618

ISSN No.:0277-786X

Date of Publication:2022-10-07

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