Influence of the Cu content on the structure and properties of Zr-Cu-N films deposited by PBAIP
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2013-01-01
Journal: Rare Metal Materials and Engineering
Included Journals: ISTIC、PKU
Volume: 42
Issue: S2
Page Number: 86-89