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A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation

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Indexed by:期刊论文

Date of Publication:2012-01-15

Journal:APPLIED SURFACE SCIENCE

Included Journals:SCIE、EI

Volume:258

Issue:7

Page Number:3045-3050

ISSN No.:0169-4332

Key Words:Ti doping; DLC; Ion implantation; Adhesion; Hydrophobic property

Abstract:Ti-doped diamond- like carbon (DLC) films were prepared on Ti alloys by reactive magnetron sputtering combined with PSII technology. The structure and properties of unmodified and Ti-doped DLC films were analyzed in a systematic way by different testing, such as TEM, XPS, frictional wear testing, contact angle measurement and so on. The results showed that Ti-doped DLC was a typical a-C:H film containing TiC nanometer grains, whose mechanical properties were obviously improved, such as hardness, wear resistance and cohesive strength, still kept good wear resistance at the ambient temperature of 450 degrees C, and held a rather large mean water contact angle of 104.2 +/- 1 degrees. (C) 2011 Elsevier B. V. All rights reserved.

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