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V and N co-doped diamond-like carbon films deposited by pulsed bias arc ion plating

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Indexed by:期刊论文

Date of Publication:2010-07-01

Journal:INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS

Included Journals:SCIE、EI、Scopus

Volume:28

Issue:4

Page Number:544-549

ISSN No.:0263-4368

Key Words:Diamond-like carbon films; Nanocomposite films; Arc ion plating; Nano-diamond

Abstract:V and N co-doped diamond-like carbon (DLC-VN) composite films were deposited on cemented carbide substrates by pulsed bias arc ion plating. The effects of V and N contents on the structures and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS), Raman spectra, grazing incident X-ray diffraction (GIXRD), transmission electron microscopy (TEM) and nano-indentation, respectively. The as-deposited films consist of a DLC-VN nanocomposite, where VN nanograins are embedded in an amorphous carbon matrix. The V and N contents have significant influences on the relative proportion of VN with respect to DLC. A proper concentration of VN nanocrystals in DLC induces even the formation of nano-diamond. The DLC-VN films have higher hardnesses than pure DLC films, which could be attributed to the nanocomposite structure. (C) 2010 Elsevier Ltd. All rights reserved.

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