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论文类型：期刊论文

发表时间：2009-11-01

发表刊物：JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

收录刊物：SCIE、EI、Scopus

卷号：27

期号：6

页面范围：1360-1364

ISSN号：0734-2101

摘要：ZrN doped diamondlike carbon composite films with different compositions were deposited on cemented carbide substrates at different nitrogen flow rates by pulsed bias arc ion plating. Scanning electron microscopy results show that the film surfaces were all uniform, smooth, and dense. X-ray photoelectron spectroscopy reveal the C contents are more than 60%, the N content increases, and the Zr content decreases with increasing nitrogen flow rate. The Raman spectra indicated that the deposited films were diamondlike carbon. X-ray diffraction results suggested that a ZrN crystalline phase was also present in the films. The hardness and elastic modulus were closely related to the composition and structure of the films and decrease with increasing nitrogen flow rates, principally due to the increase in the sp(2) content and the decrease in the ZrN crystalline phase. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3248274]