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Investigation on Material Removal Uniformity in Electrochemical Mechanical Polishing by Polishing Pad with Holes
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Date of Publication:2022-10-03

Journal:ECS Journal of Solid State Science and Technology

Volume:8

Issue:5

Page Number:P3047-P3052

ISSN No.:2162-8769

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Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:The University of Tokyo

Degree:Doctoral Degree

School/Department:Department of Mechanical Engineering

Discipline:Mechanical Manufacture and Automation

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