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Investigation on flatness in electrochemical mechanical polishing by polishing pad with holes
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Date of Publication:2022-10-03

Journal:European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

Page Number:498-499

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Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:The University of Tokyo

Degree:Doctoral Degree

School/Department:Department of Mechanical Engineering

Discipline:Mechanical Manufacture and Automation

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