Date of Publication:2022-10-03
Journal:CHINESE JOURNAL OF AERONAUTICS
Affiliation of Author(s):电子信息与电气工程学部
Volume:34
Issue:4
Page Number:518-525
ISSN No.:1000-9361
Key Words:"Inductively coupled plasma; Plasma delivery system; Plasma etching; Radio frequency network"
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Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:The University of Tokyo
Degree:Doctoral Degree
School/Department:Department of Mechanical Engineering
Discipline:Mechanical Manufacture and Automation
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