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一种用于双面电化学机械抛光平面构件的设备及方法
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First Author:Renke Kang

Disigner of the Invention:zhuxianglong,Harry,Dong Zhigang,jinzhuji,吴頔

Affilication of Author(s):机械工程学院

Application Number:CN108608314A

Authorization number:CN201810602821.0

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Senior Engineer
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:The University of Tokyo

Degree:Doctoral Degree

School/Department:Department of Mechanical Engineering

Discipline:Mechanical Manufacture and Automation

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