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个人信息Personal Information
高级工程师
博士生导师
硕士生导师
性别：男
毕业院校：东京大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
电子邮箱：guojiang@dlut.edu.cn
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A new magnetic enhanced chemical mechanical polishing method for quartz glass slender holes
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发表时间：2024-05-22
发表刊物：Journal of Materials Processing Technology
卷号：327
ISSN号：0924-0136
关键字：Aspect ratio; Cerium oxide; High quality; Internal surfaces; Large aspect ratio; Magnetic-field; Magnetic fields; Material removal; Particle size analysis; Process parameters; Quartz; Quartz glass; Slende hole; Surface properties; Surface reactions; Surface roughness; Synergistic effect; Workpiece