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论文类型：期刊论文

发表时间：2020-01-01

发表刊物：CHINESE PHYSICS B

收录刊物：EI、SCIE

卷号：29

期号：1

ISSN号：1674-1056

关键字：microfluidics; sensors; permittivity; dielectric liquid

摘要：We propose a low-cost compact microfluidic temperature sensor by virtue of the temperature-dependent permittivity of liquid. The sensor is composed of a coplanar waveguide (CPW) transmission line loaded with three resonators and a microfluidic plate with three channels. The resonant frequency of each resonator relies on the temperature-dependent dielectric property of liquid in corresponding channel, which therefore can be used to extract the temperature. The proposed sensor features a compact size and low cost since it requires only micro fluid volume instead of additional electronic components to produce significant frequency shift with changing temperature. Moreover, it exhibits decent accuracy and stability in a temperature sensing range from 30 degrees C to 95 degrees C. A theoretical analysis of the sensor is provided, followed by the detailed characterization method, and a prototype is designed, manufactured, and measured to verify the theoretical analysis.