Highly precise thickness measurement of multilayer films based on the cross-correlation algorithm using a widely tunable MG-Y laser
Release Time:2025-07-01 Hits:
Indexed by: Journal Papers
Document Code: 393412
Date of Publication: 2024-05-01
Journal: APPLIED OPTICS
Volume: 63
Issue: 13
Page Number: 3570-3575
ISSN: 1559-128X
Key Words: INTERFEROMETER; LAYERS; PHYSICAL THICKNESS; REFRACTIVE-INDEX MEASUREMENT