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Highly precise thickness measurement of multilayer films based on the cross-correlation algorithm using a widely tunable MG-Y laser

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Date of Publication:2024-06-01

Journal:Applied Optics

Volume:63

Issue:13

Page Number:3570-3575

ISSN No.:1559-128X

Key Words:Composite sensors; Cross-correlation algorithm; Demodulation algorithms; Fabry-Perot; Fast Fourier transforms; FIR filters; Impulse response; Measurements of; Modulated grating Y-branch lasers; Multilayer films; Multilayers; Multilayers films; Optical correlation; Optical multilayers; Optical thickness; Spectra's; Thickness measurement; Widely tunable

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