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个人信息Personal Information
副教授
博士生导师
硕士生导师
性别:男
毕业院校:大连理工大学
学位:博士
所在单位:物理学院
学科:光学工程
办公地点:大连理工大学物理学院325室
联系方式:13889657642 0411-84707717
电子邮箱:jingzg@dlut.edu.cn
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Highly precise thickness measurement of multilayer films based on the cross-correlation algorithm using a widely tunable MG-Y laser
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发表时间:2024-06-01
发表刊物:Applied Optics
卷号:63
期号:13
页面范围:3570-3575
ISSN号:1559-128X
关键字:Composite sensors; Cross-correlation algorithm; Demodulation algorithms; Fabry-Perot; Fast Fourier transforms; FIR filters; Impulse response; Measurements of; Modulated grating Y-branch lasers; Multilayer films; Multilayers; Multilayers films; Optical correlation; Optical multilayers; Optical thickness; Spectra's; Thickness measurement; Widely tunable