Current position: Home >> Scientific Research >> Paper Publications

SiH4浓度对混合气体Ar/SiH4/H2放电过程中粒子密度分布的影响

Release Time:2019-03-10  Hits:

Indexed by: Conference Paper

Date of Publication: 2013-08-15

Page Number: 126-126

Prev One:边缘局域模对EAST的靶板侵蚀的动力学模拟研究

Next One:脉冲介质阻挡放电脱除N2/NO体系中氮氧化物的模拟研究