Current position: Home >> Scientific Research >> Paper Publications

Modeling of high frequency atmospheric pressure Ar/H2/SiH4 glow discharges

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2011-01-01

Journal: Thin Solid Films

Volume: 519

Issue: 12

Page Number: 7014-7019

Prev One:Dynamic Monte-Carlo modeling of thermal desorption of H2 from H+ irradiated graphite

Next One:Properties of plasma sheath with ion temperature in magnetic fusion