孙继忠

个人信息Personal Information

教授

博士生导师

硕士生导师

性别:男

毕业院校:英国,赫尔大学

学位:博士

所在单位:物理学院

学科:等离子体物理

办公地点:物理系楼301

电子邮箱:jsun@dlut.edu.cn

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Study of the effects of a transverse magnetic field on radio frequency argon discharges by two-dimensional particle-in-cell-Monte-Carlo collision simulations

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论文类型:期刊论文

发表时间:2013-10-01

发表刊物:PHYSICS OF PLASMAS

收录刊物:SCIE、EI

卷号:20

期号:10

ISSN号:1070-664X

摘要:The influence of an applied magnetic field on plasma-related devices has a wide range of applications. Its effects on a plasma have been studied for years; however, there are still many issues that are not understood well. This paper reports a detailed kinetic study with the two-dimension-in-space and three-dimension-in-velocity particle-in-cell plus Monte Carlo collision method on the role of E x B drift in a capacitive argon discharge, similar to the experiment of You et al. [Thin Solid Films 519, 6981 (2011)]. The parameters chosen in the present study for the external magnetic field are in a range common to many applications. Two basic configurations of the magnetic field are analyzed in detail: the magnetic field direction parallel to the electrode with or without a gradient. With an extensive parametric study, we give detailed influences of the drift on the collective behaviors of the plasma along a two-dimensional domain, which cannot be represented by a 1 spatial and 3 velocity dimensions model. By analyzing the results of the simulations, the occurring collisionless heating mechanism is explained well. (C) 2013 AIP Publishing LLC.