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论文类型：期刊论文

发表时间：2011-09-01

发表刊物：CHINESE PHYSICS LETTERS

收录刊物：Scopus、SCIE、ISTIC

卷号：28

期号：9

ISSN号：0256-307X

摘要：We develop a method for measuring the density and charges of dust particles in a capacitive coupled cylinder discharge chamber in mixtures of gases SiH4/C2H4/Ar. Dust particles are created in situ using these reactive mixtures in rf discharge. A Langmuir probe is employed for the measurement of important plasma parameters, such as electron density, electron temperature and ion density. The density and charges of dust particles is then calculated based on the data of the measurement of these parameters and a known dust plasma sheath model. The curves of dust particle density versus rf power and gas pressure are presented, respectively, under various experimental conditions. The dust charges versus different experimental conditions are also evaluated and presented.