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论文类型：期刊论文

发表时间：2010-05-01

发表刊物：PHYSICS OF PLASMAS

收录刊物：SCIE、EI

卷号：17

期号：5

ISSN号：1070-664X

关键字：atmospheric pressure; discharges (electric); helium; plasma density; plasma simulation; plasma sources

摘要：Atmospheric-pressure capacitive discharges driven by combined radio frequency (rf) and trapezoidal pulse sources are investigated using a one-dimensional self-consistent fluid model. The results show that the plasma intensity in the rf discharge can be enhanced drastically when a low duty ratio short pulse source is additionally applied. The mechanism for the increase in the plasma density can be attributed to a strong localized electric field induced by the applied short pulse; the strong electric field generates a great number of high energy electrons and chemically active particles, which subsequently generate more electrons and ions. The rf capacitive discharges with the aid of externally applied short pulses can achieve a high plasma density with better power efficiency. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3428551]