论文成果
Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing
- 点击次数：
- 发表时间：2022-10-05
- 发表刊物：MECHANICAL SYSTEMS AND SIGNAL PROCESSING
- 文献类型：J
- 卷号：158
- ISSN号：0888-3270
- 关键字："Mass sensor; Mode localization; Higher-order; Distributed electrodes"
