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化学气相沉积法制备多晶硅工艺优化及反应器系统模拟

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Leading Scientist:yinjianzhong

Supported by:企事业单位委托科技项目

Status:结题

Supported by:江苏双良锅炉有限公司

Nature of Project:横向

Date of Project Approval:2011-05-12

Scheduled completion time:2013-05-12

Date of Project Initiation:2011-05-12

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