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发表时间：2022-10-04

发表刊物：纳米技术与精密工程

所属单位：机械工程学院

期号：3

页面范围：271-276

ISSN号：1672-6030

摘要：Micro electroforming is an effective technique for fabricating metal mold which can be used for the replication of micro-features. A bottle-neck problem in the mold electroforming is the unevenness for the mold surface. And the bend deformation of the metal mold is one of the main causes of the unevenness of the mold surface which will bring adverse effects on the size precision of replicated microstructures. In this paper, micro electroforming process parameters were optimized to obtain low deformation mold. The electroforming solution contained 80-90 g/L nickel (Ni) ion, 40-45 g/L boric acid and 0.3% L-1 wetting agents, and its pH value was 3.7-4.2. The electroforming temperature was controlled at 50-55��C. The pulse current was used during electroforming with a density of 2-3 A/dm2 and a duty cycle of 0.2. Results show that by using the optimized parameters, the deformation of the metal mold was reduced by 19%. A Ni mold, which contains the micro-features of 5 ��m in width and 5 ��m in height, was fabricated for hot embossing.

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