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论文类型：期刊论文
发表时间：2016-04-01
发表刊物：MICROFLUIDICS AND NANOFLUIDICS
收录刊物：SCIE、EI、Scopus
卷号：20
期号：4
ISSN号：1613-4982
关键字：Hybrid micro-nano channel; PDMS; Surface modification; UV-thermal nanoimprint
摘要：Micro-nano fluidic chips have become important tools in biomedical testing and research, their more frequent and diverse application being hampered mainly by their high cost, reflective of complex and expensive production methods. Our study introduces a simple, cost-effective new procedure whereby a sturdy PDMS mold consisting of two layers of poured PDMS with a photomask film bonded between them is used for replicating a hybrid micro-nano structure on a SU-8 substrate. The bottom surface of the mold receives a pattern of nano-ridges by pouring the first layer of PDMS on a 2D silicon nano-mold obtained by plasma etching after inclined Cu deposition. Using the double-layer PDMS mold, nano-channels can be imprinted with micro-channels cross-linked through the photomask in a single step of UV-thermal imprinting. The advantages of our end product, a chip with 205-mu m-wide and 10-mu m-deep micro-channels, cross-linked with 158-nm-wide and 90-nm-deep nano-channels, are its high precision and low cost.