大连理工大学主页平台管理系统齐莉萍--中文主页-- A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips

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A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips

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发表时间：2022-10-05
发表刊物：JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷号：28
期号：11
ISSN号：0960-1317

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