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论文类型：期刊论文

发表时间：2011-08-01

发表刊物：Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010)

收录刊物：SCIE、EI、CPCI-S

卷号：519

期号：20,SI

页面范围：6990-6993

ISSN号：0040-6090

关键字：Glow discharge; Atmospheric pressure; Radio-frequency

摘要：In this study, the discharge characteristics of the developed atmospheric pressure homogeneous and cold plasma source in Ar/O-2 glow discharge driven by radio-frequency (13.56 MHz) are investigated experimentally by means of electric measurements. The electron density is estimated to be in the order of 10(11) cm(-3) in the abnormal discharge regime and is reduced by half in amount when the oxygen is mixed into argon plasma at oxygen-to-argon ratio of 03 and 0.6 vol.% at the same input power. The estimated electron temperature assumes the value of 1.4 eV in the abnormal discharge regime and the addition of oxygen to the argon plasma at the oxygen-to-argon ratio smaller than 1.0 vol.% does not alter the electron temperature appreciably. (C) 2011 Elsevier B.V. All rights reserved.