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论文类型：期刊论文

发表时间：2015-05-01

发表刊物：PLASMA SOURCES SCIENCE & TECHNOLOGY

收录刊物：SCIE、EI、Scopus

卷号：24

期号：3

ISSN号：0963-0252

关键字：microwave; plasma; atmospheric pressure

摘要：Atmospheric-pressure microwave induced N-2 plasma is diagnosed by optical emission spectroscopy with respect to the plasma gas temperature. The spectroscopic measurement of plasma gas temperature is discussed with respect to the spectral line broadening of Ar I and the various emission rotational-vibrational band systems of N-2(B-A), N-2(C-B) and N-2(+)(B-X). It is found that the Boltzmann plot of the selective spectral lines from N-2(+)(B-X) at 391.4 nm is preferable to others with an accuracy better than 5% for an atmosphericpressure plasma of high gas temperature. On the basis of the thermal balance equation, the dependences of the plasma gas temperature on the absorbed power, the gas flow rate, and the gas composition are investigated experimentally with photographs recording the plasma morphology.