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论文类型：期刊论文

发表时间：2006-12-01

发表刊物：JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS

收录刊物：EI、SCIE、Scopus

卷号：45

期号：12

页面范围：9213-9215

ISSN号：0021-4922

关键字：plasma jet; atmospheric pressure; electron temperature; electron density

摘要：In this study, the electrical discharge characteristics of an atmospheric-pressure helium plasma jet using radio-frequency power supply are investigated by measuring the electrical parameters (voltage, current, power, and phase angle). The plasma parameters (electron temperature and electron density) are estimated on the basis of the electrical experiment data using the equivalent circuit model and the power balance equation. By varying input power, a "phase saturation" region is identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40slpm in the experiment.