Li Tao
Associate Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Gender:Female
Alma Mater:Harbin Institute of Technology
Degree:Doctoral Degree
School/Department:School of Mechanical Engineering
Discipline:Mechanical Design and Theory. Intelligent Manufacturing. Mechanical Manufacture and Automation. Mechanical Engineering. Intelligent Manufacturing Technology
Business Address:8027 room, School of Mechanical Engineering building
E-Mail:
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Date:2019-03-11
Indexed by:Conference Paper
Date of Publication:2014-01-01
Included Journals:CPCI-S、EI
Volume:15
Page Number:32-37
Key Words:Low Pressure Chemical Vapor Deposition (LPCVD); TiO2 thin film; material consumption; energy consumption; material utilization; energy efficiency
Abstract:In this paper, Low Pressure Chemical Vapor Deposition (LPCVD) of TiO2 thin film process is chosen as the research object to study the material and energy consumptions in this process. The material and energy utilization efficiencies have been calculated and compared under five different reaction conditions (623K, 500Pa; 673K, 500Pa; 723K, 500Pa; 673K, 400Pa; 673K, 300Pa). The material utilization efficiency result reveals that the material utilization in this process is rather low (less 1% in each condition) and increases with higher temperature and lower pressure. The energy analysis result shows that the energy efficiency is extremely low (less 0.1% in each condition) and increases with decreasing temperature and increasing pressure. The reaction condition (623K, 500Pa) is regarded as a satisfactory condition with the highest energy efficiency (0.083%) in spite of the lowest material utilization efficiency (0.5%). This research can lay a foundation for the future optimization work to improve the sustainability performance of LPCVD preparing thin films. (C) 2014 Published by Elsevier B. V.
Ph.D, associate professor, doctoral supervisor, graduated from Harbin Institute of technology, mainly engaged in product sustainability evaluation methods, laser repair technology, mechanical equipment energy consumption analysis and evaluation, enterprise information technology development and application. Reviewers of many domestic and foreign journals in related fields, presided over or participated in more than 20 projects of national key research and development plan, national 973 program, national Natural Science Foundation of China and enterprises, and published more than 100 papers. Ph.D Li has trained or assisted in the training of more than 50 doctoral and master degree students.
