Li Tao
Associate Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Gender:Female
Alma Mater:Harbin Institute of Technology
Degree:Doctoral Degree
School/Department:School of Mechanical Engineering
Discipline:Mechanical Design and Theory. Industrial Engineering. Mechanical Manufacture and Automation
Business Address:8027 room, School of Mechanical Engineering building
E-Mail:
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Date:2019-03-11
Indexed by:Conference Paper
Date of Publication:2012-01-01
Included Journals:CPCI-S
Key Words:Low Pressure Chemical Vapor Deposition; Nano-TiO2 film; Thermodynamic model; Energy efficiency
Abstract:With its unique and perfect performance, Nano-TiO2 film has been widely used in many fields. However, the preparation of Nano-TiO2 film has significant sustainability issues including heavy use of energy and materials, low production efficiency, toxic chemical emissions, etc. In this research, case study is conducted on a Low Pressure Chemical Vapor Deposition (LPCVD) process for nano-TiO2 film preparation. For studying chemical reaction energy consumption of LPCVD process, film preparation techniques, chemical engineering thermodynamics and the law of thermodynamics are used to establish parametric thermodynamic model with such thermodynamic metrics as enthalpy change, entropy change and effective energy change. The heat production rate of chemical reaction has been obtained based on reaction rate function and thermodynamic model. Setting certain chemical reaction condition, the corresponding thermodynamic values of Nano-TiO2 film preparation are calculated. At the same time, the energy utilization and material utilization are obtained. To validate the results, the LPCVD process is simulated with Fluent software. The calculated results are compared with the simulation results and are validated. The research can be the basis theory of processes and equipment energy optimization for Nano-TiO2 film preparation.
Ph.D, associate professor, doctoral supervisor, graduated from Harbin Institute of technology, mainly engaged in product sustainability evaluation methods, laser repair technology, mechanical equipment energy consumption analysis and evaluation, enterprise information technology development and application. Reviewers of many domestic and foreign journals in related fields, presided over or participated in more than 20 projects of national key research and development plan, national 973 program, national Natural Science Foundation of China and enterprises, and published more than 100 papers. Ph.D Li has trained or assisted in the training of more than 50 doctoral and master degree students.
