Li Tao

Associate Professor   Supervisor of Doctorate Candidates   Supervisor of Master's Candidates

Gender:Female

Alma Mater:Harbin Institute of Technology

Degree:Doctoral Degree

School/Department:School of Mechanical Engineering

Discipline:Mechanical Design and Theory. Intelligent Manufacturing. Mechanical Manufacture and Automation. Mechanical Engineering. Intelligent Manufacturing Technology

Business Address:8027 room, School of Mechanical Engineering building

E-Mail:


Paper Publications

Chemical reaction thermodynamic model of low pressure CVD for Nano-TiO 2 film preparation

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Date:2019-10-19

Indexed by:Conference Paper

Date of Publication:2012-05-16

Included Journals:Scopus、EI

Abstract:With its unique and perfect performance, Nano-TiO 2 film has been widely used in many fields. However, the preparation of Nano-TiO 2 film has significant sustainability issues including heavy use of energy and materials, low production efficiency, toxic chemical emissions, etc. In this research, case study is conducted on a Low Pressure Chemical Vapor Deposition (LPCVD) process for nano-TiO 2 film preparation. For studying chemical reaction energy consumption of LPCVD process, film preparation techniques, chemical engineering thermodynamics and the law of thermodynamics are used to establish parametric thermodynamic model with such thermodynamic metrics as enthalpy change, entropy change and effective energy change. The heat production rate of chemical reaction has been obtained based on reaction rate function and thermodynamic model. Setting certain chemical reaction condition, the corresponding thermodynamic values of Nano-TiO 2 film preparation are calculated. At the same time, the energy utilization and material utilization are obtained. To validate the results, the LPCVD process is simulated with Fluent software. The calculated results are compared with the simulation results and are validated. The research can be the basis theory of processes and equipment energy optimization for Nano-TiO 2 film preparation. ? 2012 IEEE.

Personal Profile

Ph.D, associate professor, doctoral supervisor, graduated from Harbin Institute of technology, mainly engaged in product sustainability evaluation methods, laser repair technology, mechanical equipment energy consumption analysis and evaluation, enterprise information technology development and application. Reviewers of many domestic and foreign journals in related fields, presided over or participated in more than 20 projects of national key research and development plan, national 973 program, national Natural Science Foundation of China and enterprises, and published more than 100 papers. Ph.D Li has trained or assisted in the training of more than 50 doctoral and master degree students.

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