Li Tao
Associate Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Gender:Female
Alma Mater:Harbin Institute of Technology
Degree:Doctoral Degree
School/Department:School of Mechanical Engineering
Discipline:Mechanical Design and Theory. Intelligent Manufacturing. Mechanical Manufacture and Automation. Mechanical Engineering. Intelligent Manufacturing Technology
Business Address:8027 room, School of Mechanical Engineering building
E-Mail:
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Date:2019-10-19
Indexed by:Conference Paper
Date of Publication:2013-04-17
Included Journals:Scopus、EI
Page Number:285-290
Abstract:In this paper exergy analysis is applied on Atomic Layer Deposition (ALD) of Al2O3 thin film to analyze the utilization and losses of exergy in ALD system. The exergies associated with material flow, heat flow, and work flow are calculated. Based on the exergy balance equation, exergy loss is calculated for the ALD Al2O3 process and then exergy efficiency is calculated with a value of 2.72 10-5. According to the result it can be concluded that the utilization of exergy is extremely low in ALD Al2O3 process. This research can be useful for future energy consumption and optimization of ALD system.
Ph.D, associate professor, doctoral supervisor, graduated from Harbin Institute of technology, mainly engaged in product sustainability evaluation methods, laser repair technology, mechanical equipment energy consumption analysis and evaluation, enterprise information technology development and application. Reviewers of many domestic and foreign journals in related fields, presided over or participated in more than 20 projects of national key research and development plan, national 973 program, national Natural Science Foundation of China and enterprises, and published more than 100 papers. Ph.D Li has trained or assisted in the training of more than 50 doctoral and master degree students.
