Li Tao
Associate Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Gender:Female
Alma Mater:Harbin Institute of Technology
Degree:Doctoral Degree
School/Department:School of Mechanical Engineering
Discipline:Mechanical Design and Theory. Intelligent Manufacturing. Mechanical Manufacture and Automation. Mechanical Engineering. Intelligent Manufacturing Technology
Business Address:8027 room, School of Mechanical Engineering building
E-Mail:
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Date:2019-03-09
Indexed by:Journal Article
Date of Publication:2014-01-01
Journal:INTERNATIONAL JOURNAL OF EXERGY
Included Journals:Scopus、EI、SCIE
Volume:15
Issue:1
Page Number:62-75
ISSN:1742-8297
Key Words:energy analysis; ALD; atomic layer deposition; Al2O3 nano-film; first law of thermodynamics; energy flow; second law of thermodynamics; exergy; exergy flow; exergy efficiency; degree of perfection; energy efficiency; energy consumption; energy utilisation efficiency
Abstract:In this paper, energy and exergy analyses of atomic layer deposition (ALD) of Al2O3 nano-film has been conducted. First, based on the first law of thermodynamics, the energy flow in ALD of Al2O3 nano-film preparation system is analysed. Second, the exergy flow in the system is analysed based on the second law of thermodynamics. Two different kinds of exergy efficiencies are introduced, including the simplest definition for exergy efficiency and the degree of perfection. In the end, the exergy efficiency in this system is calculated by using the two kinds of exergy efficiency calculation methods. The results of analyses on the ALD of the Al2O3 nano-film process demonstrate the extremely low efficiency of energy in the ALD system. Thus, it is necessary and meaningful to find ways to reduce energy consumption and improve the energy utilisation efficiency in ALD operation process.
Ph.D, associate professor, doctoral supervisor, graduated from Harbin Institute of technology, mainly engaged in product sustainability evaluation methods, laser repair technology, mechanical equipment energy consumption analysis and evaluation, enterprise information technology development and application. Reviewers of many domestic and foreign journals in related fields, presided over or participated in more than 20 projects of national key research and development plan, national 973 program, national Natural Science Foundation of China and enterprises, and published more than 100 papers. Ph.D Li has trained or assisted in the training of more than 50 doctoral and master degree students.
